Valves
High Vacuum Valves
XL Series Angle Valves XVD Smooth Vent Valve SMC makes high vacuum angle valves with excellent thermal conductivity that results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valves do not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers. They also make slit valves suitable for the partition valve between the load lock chamber and the transfer chamber, and between the transfer chamber and the process chamber in semiconductor manufacturing equipment, etc.
